Computer-readable Image Markers for Automated Registration in Correlative Microscopy – “autoCRIM”

• Correlative Microscopy using surface analysis techniques 3-Dimentional data representation of a at the nanoscale SIMS, EDX, AFM and SEM Automated Image Registration Focussed Ion-Beam (FIB) fiducial markers We present newly developed methodology computer-readable to allow images from multiple imaging modalities be registered automatically. This makes it possible correlate many provide an unprecedented level detail on nanometre scale that no one technique can alone. provides capability navigate specific areas interest when transferring samples machine seamlessly. Then taking acquired scanning electron microscope (SEM), secondary ion mass spectrometry (SIMS), x-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) optical inspection tools combining all then generate 3D representative model surface.